| ㆍ Crystal range
and precision (MHz) |
: 6.0 to 5.0 ±0.05 Hz (per ms sample) |
| ㆍ Tichkness
accuracy |
: 0.5 % |
| ㆍ Measurement
frequency |
: 4 Hz |
| ㆍ Source control
voltage |
: 0 to ±10 V |
| ㆍ Number of
Sources |
: 2 |
| ㆍ Output resolution |
: 15 over the full range(10V) Bit |
| ㆍ Update rate,
max |
: 4 Hz |
| ㆍ Inputs |
: 8 defined TTL/CMOS logic compatible or closure to
ground |
| ㆍ Output |
: 12 single pole closing contact (relays), 2.5A at 120V(100VA) |
| ㆍ Operating
power requirements |
: 90 to 132V AC or 180 to 264V AC 25VA |
| ㆍ Thin film
program |
: 9 |
| ㆍ Process layers |
: 3 |
| ㆍ Hardware
interface sensor single |
: 2 |
| ㆍ Hardware interface
sensor dual |
: 1 |
| ㆍ Crucible
positions |
: 8 |
| ㆍ Weight |
: 2.7 kg |
