Optical Coating Chamber
 
| Mechanical Booster | Roots Vacuum | Rotary WSDM 7.5K | Oil Diffusion | Rotary KP-6000W |
 
 
 The Specification
 ¤ý Description Rotary Pump
 ¤ý Maker EDWARD
 ¤ý Model E2M275 (Two stage)

 ¤ý Displacement (swept olume) 50 Hz : 292 §©h-1
 ¤ý Displacement (swept olume) 60 Hz : 350 §©h-1
 ¤ý Speed (pneurop) 50 Hz : 255 §©h-1
 ¤ý Speed (pneurop) 60 Hz : 306 §©h-1
 ¤ý Ultimate vacuum  
      (partial pressure) without gas ballast : 10-4 mbar
      (partial pressure) with gas ballast : 5 x 10-3 mbar
 ¤ý Weight : 225 kg
 ¤ý Motor power 50 Hz 4-pole : 7.5 kW
 ¤ý Motor power 60 Hz 4-pole : 8.5 kW
 ¤ý Recommended oil (supplied) : ultra grade 19

 The Specification
 ¤ý Description Mechanical Booster Pump
 ¤ý Maker EDWARD
 ¤ý Model EH1200

 ¤ý Displacement (swept olume) 50 Hz : 1195 §©h-1
 ¤ý Displacement (swept olume) 60 Hz : 1435 §©h-1
 ¤ý Speed (pneurop) 50 Hz : 0 -2900 r.min-1
 ¤ý Speed (pneurop) 60 Hz : 0 -3500 r.min-1
 ¤ý Weight : 61 kg
 ¤ý Electrical supply voltage,3 phase 50 Hz : 220 - 240 V /380 - 415 V
 ¤ý Electrical supply voltage,3 phase 60 Hz : 208 - 230 V /460 V
 ¤ý Motor power : 3 kW
 ¤ý Recommended oil (supplied) : ultra grade 20