| The Specification |
| ㆍ Description |
Optical Coating Chamber |
|
|
| ㆍ Type |
Front Load Box Coater |
|
|
| ㆍ Chamber Diameter |
ø 1200 x 1300H |
|
|
| ㆍ Model |
Mars i 120 Series |
|
|
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|
Demension |
|
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| Top View |
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| Side View |
| |
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| Front View |
| |
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Combinable component
General
ㆍ
Rotary pump : 350 m3 h-1 1set
ㆍ
Mechanical booster pump : 1435 m3 h-1 1set
ㆍ Diffusion pump with baffle : 22"
2set
ㆍ
Valves
| |
Main valve |
: 22" 2set |
| |
Roughing valve |
: 1 " 1set, 6 " 1set |
| |
Fore line valve |
: 6 " 2set |
| |
Vent valve |
: 1 " 2set |
| ㆍ Halogen lamp |
: 0 to 300 ℃ max |
| ㆍ Substrate
rotation |
: 0 to 25 rpm (soft strat, soft stop) |
| ㆍ Vacuum gauge |
: display & control |
| ㆍ Low voltage
source |
: 2 Pole (copper electrode) |
|
Optional
ㆍ Thin film deposition controller
ㆍ Optical monitor & controller
ㆍ lon beam source
ㆍ
Electron beam source
ㆍ Chiller
ㆍ Touch screen control system
ㆍ Others
|
User Utility
ㆍ Power consumption
| |
: 380 / 220V 3-ph AC 50 / 60 Hz 50 / 60 KW |
ㆍ Compressed air supply pressure
ㆍ Cooling water supply
ㆍ Oil drain line
| |
: ISO40 flange center tapped 1 ½ " BSP |
|
