| The Specification |
| ㆍ Description |
Optical Coating Chamber |
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| ㆍ Type |
Bell Jar |
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| ㆍ Chamber Diameter |
ø 600 x 700H |
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| ㆍ Model |
Mars i yoyo Series |
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Demension |
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| Rear View |
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| Side View |
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| Front View |
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Combinable component
General
ㆍ Rotary pump : 96 m3 h-1 1set
ㆍ Diffusion pump with baffle : 8" 1set
ㆍ Valves
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Main valve
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: 10" 1set |
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Roughing valve |
: 2 1/2 " 1set |
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Fore line valve |
: 2 1/2 " 1set |
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Vent valve |
: 3/4 " 1set |
| ㆍ Halogen lamp |
: 0 to 300 ℃ max |
| ㆍ Substrate rotation |
: 0 to 25 rpm (soft strat, soft stop) |
| ㆍ Vacuum gauge |
: display & control |
| ㆍ Low voltage source |
: 2Pole(copper electrode) |
|
Optional
ㆍ Mechanical booster pump
ㆍ Thin film deposition controller
ㆍ Optical monitor & controller
ㆍ lon beam source
ㆍ Electron beam source
ㆍ Chiller
ㆍ Touch screen control system
ㆍ Others
|
User Utility
ㆍ Power consumption
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|
: 380 / 220V 3-ph AC 50 / 60 Hz 10 / 15 KW |
ㆍ Compressed air supply pressure
ㆍ Cooling water supply
ㆍ Oil drain line
|
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: 25mm flange suitable for NW25 |
| Feature |
| ㆍ Low Cost |
ㆍ Ease Operation |
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| ㆍ Compact Size |
ㆍ Fast Cycle
Time |
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| ㆍ Easy Control |
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