Optical Coating Chamber
 
 
 
 The Specification
 ㆍ Description Mass Flow Controller
 ㆍ Type Rack Mount
 ㆍ Size 483mm(W) x 100mm(H) x 440mm(D)

 

Combinable component

MFC Readout

 ㆍ Input Power : 208~230V 1-ph AC
 ㆍ Frequency : 50/60 Hz
 ㆍ Display : set value (green color)
  : position value (red color)
 ㆍ Value range : 0 to 50 sccm, 0 to 100 sccm
  : 0 to 200 sccm, 0 to 500 sccm, other
ㆍ Interface valve : 1 channel (1 by 1)
  : 2channel (1 by 2)
  : 3channel (1 by 3)

Valve
 ㆍ Mounting : chamber bottom or wall mount
 ㆍ Input voltage : ± 5V DC (±5%)
 ㆍ Output voltage : 0 to 50 V DC into >10 K ohm
 ㆍ Storage humidity : 0 to 95% relative humidity, non-condensing
 ㆍ Storage temperature : -20 ℃ to 50 ℃
 ㆍ Operation temperature : 0℃ to 50 ℃
 ㆍ Fitting : 1/4 inch swagelok compatible