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Optical Coating Chamber
| The Specification |
| ㆍ Description |
Electron Beam Guns |
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| ㆍ Model |
IEBG - 180 / IEBG - 270 |
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| Demension |
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| Technical
Date |
IEBG - 180 |
IEBG - 270 |
| Max Power |
15 (kW) |
| Deflection angele |
180 ℃ |
270 ℃ |
| Max scan |
X,Y ±15 |
X,Y ±10 |
| Weight |
18 kg (about) |
20 kg (about) |
| Frequency |
X / 50 Hz, Y / 500 Hz |
| Liner material |
copper or graphite (18.3
cc) |
| Crucible linerQuantity (Capacity) |
1 |
| 2 |
| 3 (38.6 cc) |
| 4 (23.7 cc) |
| 6 (11 or 18.3 cc) |
| Colling system |
water cooling |
| Colling water |
9 ~ 10 ( ℓ/min ) |
| Filament |
0.55 T |
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