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Optical Coating Chamber
| The Specification |
| ㆍ Description |
Control Panel |
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| ㆍ Type |
General |
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(manual/automatic Mode) |
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| ㆍ Control Panel |
Rear single dooor |
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Front 19 inch rack type |
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Bottom roller attached |
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| ㆍ Size (W.H.D) |
600mm x 2000mm x 900mm |
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| ㆍ Safety Interlock |
Controlled by PLC |
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Combinable component
Vacuum Pump Control
| ㆍ Rotary pump, Booster
pump, Diffusion pump |
| ㆍ Cryogenic pump (optical) |
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Vacuum Valve Control
| ㆍ Pneumatic valve (auto/manual) |
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Substrate Temperature Control
| ㆍ Micro sheath, Halogen
heater |
Rotation Control
| ㆍ Variable speed motor
with gear reducer |
Film Thickness Control
| ㆍ crystal sensor thickness
monitor |
| ㆍ Optical thickness monitor
(optical) |
Vacuum Gauge Control
| ㆍ Thermocouple or pirani
(low torr) |
| ㆍ lon gauge or penning (high
torr) |
Electron Beam Singnal Control
| ㆍ Interlock, external on/off
sweep |
Ion Beam Singnal Control
| ㆍinterlock, external start/stop,
etching /assist 1/assist 2 |
Mass Flow Control
| ㆍExternal flow on/off value
setting |
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